<p>An anode (8) of an X-ray source is provided by successively forming a first metal layer (2), an insulating layer (3) and a second metal layer (4) on a base (1). The first metal layer (2) has an element having a larger atomic number than that of an element constituting the second metal layer (4). On the insulating layer (3) and the second metal layer (4), a hole (6) is provided to partially expose the first metal layer (2).</p>
