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发明名称
POLYMER HAVING SPIRO CYCLIC KETAL PENDANT GROUP FOR PHOTORESIST AND PHOTORESIST COMPOSITION INCLUDING THE SAME
摘要
申请公布号
KR20050110847(A)
申请公布日期
2005.11.24
申请号
KR20040035791
申请日期
2004.05.20
申请人
DONGJIN SEMICHEM CO., LTD.
发明人
LEE, JAE WOO;KIM, DEOG BAE;KIM, JAE HYUN
分类号
G03F7/039;(IPC1-7):G03F7/039
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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