| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of easily simplifying the structure of a device, and making it possible to implement the high-speed and high-precision independent positioning of two mobile objects. <P>SOLUTION: A positioning device comprises first and second surface plates 4B and 4C, two mobile objects 12 and 13 which are guided by the first and second surface plates 4B and 4C and which move on the first and second surface plates 4B and 4C, and a surface plate drive mechanism 4D for changing the distance between the first and second surface plates 4B and 4C. The surface plate drive mechanism 4D secures a predetermined distance between the first and second surface plates 4B and 4C, when one of the two mobile objects 12 and 13 moves on the first surface plate 4B and the other thereof moves on the second surface plate 4C. The surface plate drive mechanism allows the first and second surface plates 4B and 4C to be approached to each other, when the two mobile objects 12 and 13 move between the first and second surface plates 4B and 4C. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
