| 摘要 |
PROBLEM TO BE SOLVED: To measure (monitor) the inspection gas concentration continuously and highly accurately over a long time. SOLUTION: In this optical interference type gas concentration measuring device, light from a light source lamp is allowed to pass through a gas chamber where the inspection gas is introduced and a reference chamber filled with a reference gas through a plane mirror, and the inspection gas concentration is measured based on displacement of an interference fringe of the light. The inspection gas is introduced into the gas chamber at every prescribed time, and the light source lamp is lit only at every prescribed time, to thereby measure the inspection gas concentration at every prescribed time continuously. COPYRIGHT: (C)2006,JPO&NCIPI
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