| 摘要 |
PROBLEM TO BE SOLVED: To efficiently measure the concentration of an element with high precision by calculating a proper measuring time or the irradiation current value of an electron beam by operation. SOLUTION: In this element concentration measuring instrument, a sample 7 is irradiated with the electron beam 6 and characteristic X-rays 6 generated corresponding to the element contained in the sample 7 are detected to measure the concentration of the element in the sample 7, the measuring time corresponding to a predetermined concentration measuring lower limit value is calculated on the basis of the irradiation current value to be displayed and measurement is carried out on the basis of the displayed measuring time. Further, in the element concentration measuring instrument, the irradiation current value of the electron beam 6 corresponding to the predetermined concentration measuring lower limit value is calculated on the basis of the measuring time to be displayed and measurement is carried out on the basis of the displayed irradiation current value. COPYRIGHT: (C)2006,JPO&NCIPI
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