METHOD AND DEVICE FOR LASER IRRADIATING

摘要

PROBLEM TO BE SOLVED: To provide a laser irradiating technique which can irradiate an irradiation surface with a laser beam having a uniform energy intensity distribution using a cylindrical lens array while avoiding the influence on the intensity distribution of an original beam.

SOLUTION: A laser beam emitted from a laser oscillator is passed through two types of cylindrical lens arrays of a convex cylindrical lens array and a convex cylindrical lens array so that the laser beam is divided into a plurality of beams having inverted energy intensity distributions after the passage of the lens arrays. That is, the two types of linear laser beams having inverted energy intensity distributions are formed and then overlapped with each other in their short-dimension direction to be projected. Consequently, an irradiation surface can be irradiated with a linear beam having a uniform intensity.

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