| 摘要 |
PROBLEM TO BE SOLVED: To provide an amorphous magnetic thin film which concurrently satisfies a high saturation magnetization and a high resistivity, and easily acquires a high frequency magnetic permeability caused by an excitation in a hard axis of magnetization. SOLUTION: The amorphous magnetic thin film whose composition is substantially expressed by a formula (Fe<SB>1-x</SB>Co<SB>x</SB>)<SB>1-y</SB>(B<SB>1-z</SB>X<SB>z</SB>)<SB>y</SB>(in the formula, X denotes an element containing at least carbon selected from 4B group elements, and exists in the range 0<x≤0.5, y denotes a range where a magnetic anisotropy energy of the amorphous magnetic thin film serves as positive values, and z exists in the range 0<z<1), comprises a microstructure composed of a first amorphous phase 1 which contains both iron and cobalt and bears a magnetism, and a second amorphous phase 2 which is disposed around the first amorphous phase 1 and contains boron and carbon; and is provided with a uniaxial magnetic anisotropy in a plane. COPYRIGHT: (C)2006,JPO&NCIPI
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