| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation method of an optical element capable of measuring the shape looked from incident light of the optical element having an arbitrary shape or the relation between the incident light and reflected light accurately, simply and inexpensively. SOLUTION: In the evaluation method of the optical element having a multilayered film, the phase difference between the light incident on the multilayered film and the light reflected from the multilayered film is calculated using a standing wave generated when light with a wavelength of 2-40 nm is allowed to enter the optical element having a means for suppressing the charging of the multilayered film. COPYRIGHT: (C)2006,JPO&NCIPI
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