| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecular pump capable of preventing temperature rise of a rotor by increasing heat radiation from a rotor surface of the turbo molecular pump, limiting emission of gas from the rotor surface and reducing adhesion of products of exhaust gas on a surface of a blade. SOLUTION: The turbo molecular pump 1 having a stationary blade stage 10b including a large number of stationary blades 10a and a moving blade stage 5b including a large number of moving blades 5a arranged alternately in a pump casing 2 is constructed in such a manner that fluororesin coating is applied on surfaces of the plurality of stationary blades 10a and moving blades 5a in the stationary blade stage 10b and the moving blade stage 5b positioned near an exhaust port 4, and stationary blades 10a and moving blades 5a in other part of stages are left as having metallic surfaces. COPYRIGHT: (C)2006,JPO&NCIPI
|
