| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus for detoxifying exhaust gas whose detoxification rate of exhaust gas is improved and to provide a method for detoxifying exhaust gas, and a system for manufacturing an electronic device. <P>SOLUTION: The detoxification apparatus 100 for detoxifying the exhaust gas to be discharged from a semiconductor treatment apparatus 90 is provided with: an exhaust pipe 10 through which the exhaust gas discharged from the semiconductor treatment apparatus 90 is made to flow; a first scrubber 21 connected to the exhaust pipe 10 for detoxifying a harmful component in the exhaust gas; a reaction cylinder 30; a second scrubber 22; an outlet water scrubber 23; and a heater control unit 50 for controlling the heat-treatment temperature in the reaction cylinder 30 by a feedforward system on the basis of the treatment condition of the semiconductor treatment apparatus 90. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
