发明名称 AIR CLEANING APPLIANCE USED FOR GLASS SUBSTRATE CARRYING BOX AND METHOD OF USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide an air cleaning appliance used for a glass substrate carrying box capable of almost removing particles in the box at least when a glass substrate is stored in the carrying box and a method of using the air cleaning appliance. SOLUTION: In this air cleaning appliance, air is allowed to flow in along a plurality of support grooves M1 formed in the inner wall of one side plate 8a and to flow out to the outside through a plurality of support grooves M2 formed in the inner wall of the other side plate 8b by the operation of an air cleaner CU fitted to a second cover body F2. The air is circulated through the entire part in a box body 2, and the particles liable to be stored in the support grooves M1, M3, and M2 can be efficiently discharged. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005324913(A) 申请公布日期 2005.11.24
申请号 JP20040143835 申请日期 2004.05.13
申请人 KYOKUHEI GLASS KAKO KK 发明人 HIRABAYASHI TAKAO
分类号 G02F1/13;B65D85/86;B65G49/00;B65G49/06;G02F1/1333;H01L21/673;H01L21/68;(IPC1-7):B65G49/06;G02F1/133 主分类号 G02F1/13
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