A thin film ceramic thermocouple (10) having two ceramic thermocouple (12, 14) that are in contact with each other in at least on point to form a junction, and wherein each element was prepared in a different oxygen/nitrogen/argon plasma. Since each element is prepared under different plasma conditions, they have different electrical conductivity and different charge carrier concentration. The thin film thermocouple (10) can be transparent. A versatile ceramic sensor system having an RTD heat flux sensor can be combined with a thermocouple and a strain sensor to yield a multifunctional ceramic sensor array. The transparent ceramic temperature sensor that could ultimately be used for calibration of optical sensors.
申请公布号
WO2005112140(A2)
申请公布日期
2005.11.24
申请号
WO2005US12004
申请日期
2005.04.12
申请人
THE BOARD OF GOVERNORS FOR HIGHER EDUCATION, STATEOF RHODE ISLAND AND PROVIDENCE PLANTATIONS;GREGORY, OTTO;FRALICK, GUSTAVE;WRBANEK, JOHN;YOU, TAO
发明人
GREGORY, OTTO;FRALICK, GUSTAVE;WRBANEK, JOHN;YOU, TAO