| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve problems in a conventional scanning surface probe microscope (SPM) method or an X-ray diffraction (XRD) method that it requires a diffractometer (multiaxis diffractometer) with a plurality (normally, four axes or more) of rotational axes and a table for rough adjustment on a specimen since the SPM method provides no information on crystal structure, etc. while providing information on the shape of an ultrafine structure from unevenness information on a substance surface, and further, the XRD method requires that the angle of a specimen is precisely adjusted with respect to an incident X-ray beam so as to cause Bragg diffraction from the ultrafine structure and that the angle is adjusted to the direction of diffraction X rays generated in an X-ray detector. <P>SOLUTION: Short-wavelength X rays of 0.1 nm or less are let into an ultrafine structure, such as an ultrafine nanowire developed on a surface of a substrate crystal, a buried ultrafine nanowire put between a substrate crystal and a cap layer for covering its surface, or a thin film crystal, from its surface at an angle of several degrees or less. Diffraction X rays generated are recorded in a two-dimensional X-ray detector at a stroke in a short period of time, thereby visualizing the intensity of diffraction X rays from the ultrafine structure in a reciprocal lattice space to rapidly analyze its structure. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
