CHARGED PARTICLE BEAM DEVICE AND SPECIMEN HOLDER

摘要

PROBLEM TO BE SOLVED: To reduce wrong operation of a user of an electron microscope on which a specimen holder can be mounted, and to facilitate the management of information of the specimen. SOLUTION: The information on the specimen holder or the information on the loaded specimen is stored in a memory 303 of the specimen holder 11. By sending the information on the specimen holder 11 to the electron microscope by accessing the memory 303 of the specimen holder 11 mounted on the electron microscope, the user can use it without mistaking the property of the specimen holder, and the danger of accidentally recording the information on the sample can be reduced. COPYRIGHT: (C)2006,JPO&NCIPI