发明名称 Adhesion promoting technique
摘要 A technique to promote the adhesion and uniform distribution of a spin coated film upon a ferroelectric material. At least one embodiment of the invention uses a ferroelectric material, such as PVDF/TrFE, to promote the adhesion of a spin-coated film onto a wafer.
申请公布号 US2005260415(A1) 申请公布日期 2005.11.24
申请号 US20050195226 申请日期 2005.08.02
申请人 ANDIDEH EBRAHIM 发明人 ANDIDEH EBRAHIM
分类号 H01L21/02;(IPC1-7):B32B27/00 主分类号 H01L21/02
代理机构 代理人
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