发明名称 Low optical overlap mode (LOOM) waveguiding system and method of making same
摘要 An optical system including: a substrate having a recess; and, a substantially planar, semiconductor waveguiding membrane suspended over the recess and having a thickness less than about 200 nm; wherein, the optical system supports a propagating optical mode having a majority of its energy external to the semiconductor waveguiding membrane.
申请公布号 US2005259937(A1) 申请公布日期 2005.11.24
申请号 US20050091186 申请日期 2005.03.28
申请人 WHALEY RALPH D JR;ABELES JOSEPH H;KWAKERNAAK MARTIN H;KHALFIN VIKTOR B;CHAN WINSTON K;AN HAIYAN;LIPP STEVEN 发明人 WHALEY RALPH D.JR.;ABELES JOSEPH H.;KWAKERNAAK MARTIN H.;KHALFIN VIKTOR B.;CHAN WINSTON K.;AN HAIYAN;LIPP STEVEN
分类号 G02B6/10;G02B6/12;G02B6/122;H01L21/00;(IPC1-7):G02B6/10 主分类号 G02B6/10
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