发明名称 Dynamic mask projection stereo micro lithography
摘要 Three-dimensional structures are fabricated by a process in which a 3D solid model is designed by software at a PC and sliced into a series of 2D layers. Each 2D layer is displayed at a dynamic mask via micro-mirror deflections projected onto a photoresist to form a layer, which is lowered and the process is repeated to build the object layer by layer.
申请公布号 US2005259785(A1) 申请公布日期 2005.11.24
申请号 US20030380229 申请日期 2003.08.12
申请人 ZHANG XIANG 发明人 ZHANG XIANG
分类号 B29C67/00;G03F7/00;G03F7/20;G21K5/00;(IPC1-7):G21K5/00 主分类号 B29C67/00
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