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发明名称
Verfahren zur Herstellung druckdichter Durchkontaktierungen
摘要
申请公布号
DE19742072(B4)
申请公布日期
2005.11.24
申请号
DE19971042072
申请日期
1997.09.24
申请人
ROBERT BOSCH GMBH
发明人
MOSER, MANFRED;SEIBOLD, ANNETTE;SCHUETZ, REINER
分类号
H01L21/48;H05K1/03;H05K3/40;(IPC1-7):H05K3/42
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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