OPTICAL DEFLECTOR AND ITS CONTROL METHOD

摘要

PROBLEM TO BE SOLVED: To simplify a structure and manufacturing steps without causing deterioration in mirror surface precision and reduction in natural frequency caused by an increase in the mass. SOLUTION: In an optical deflector, a plurality of movable operators are serially connected by a plurality of twisted springs. A portion of the plurality of the twisted springs is supported by a supporting section and at least one or more number of twisted springs among the plurality of the twisted springs have a sensor. COPYRIGHT: (C)2006,JPO&NCIPI