METHOD FOR PRODUCING HALOSILANE AND METHOD FOR PURIFYING SOLID COMPONENT

摘要

A method for producing a halosilane which comprises steps of [1] subjecting a spent slurry (1) composed of a slurry comprising an aqueous dispersant and abrasive grains dispersed therein and silicon grains incorporated therein to a primary centrifugal separation, to thereby recover a solid component (3b) containing the abrasive grains as a main component, of [2] subjecting the resultant fluid component (3a) from the primary centrifugal separation operation to a second centrifugal separation, to thereby separate the fluid component into a fluid component (5a) containing the dispersant as a main component and a residual sludge (5b), of [3] subjecting a solid component (7b) obtained by the distillation of the resultant fluid component (5a) from the second centrifugal separation operation to pulverization and the removal of organic residues, and then of [4] reacting the resultant solid component with a halogenating agent, followed by the purification of the resultant reaction product.