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发明名称
Räumlich gleichförmige Gaszufuhrvorrichtung und Pumpenanordnung für grosse Waferdurchmesser
摘要
申请公布号
DE69827732(T2)
申请公布日期
2005.11.24
申请号
DE19986027732T
申请日期
1998.09.17
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK;INFINEON TECHNOLOGIES AG
发明人
MULLER, KARL P.;FLIETNER, BERTRAND;ROITHNER, KLAUS
分类号
H01L21/302;H01J37/32;H01L21/3065;(IPC1-7):H01J37/32;C23C16/44
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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