| 摘要 |
PROBLEM TO BE SOLVED: To surely measure a dynamic shape of an object to be measured, without incurring extra costs. SOLUTION: A system for measuring a dynamic shape which acquires the surface shape of the object to be measured which is in a displaced state, is equipped with a first light source 5 irradiating the object to be measured 1 in the displacement state with a light; irradiation optics 7, 8 and 9; a timing-adjusting means 3 for adjusting a timing between a displacement of the object to be measured 1 and the irradiation of the light; an interference optical system 12, causing reference light to interfere with the reflected light from the object to be measured 1; a light-receiving means 11 for receiving this interference pattern; an imaging means 10 for making the interference pattern focused on a light-receiving surface; and a computing unit which computes the surface shape of the object to be measured 1 from the interference pattern. In the system, the object to be measured 1 is irradiated with a pulsed light, or the interference pattern is received in duration which is in the emission time of the light source 5 or in the reception time of the light-receiving means 11, and in which the displacement of the object to be measured 1 is not more than a half of the wavelength of the light source 5; and then the shape contour of the object to be measured 1 in the displacement state is computed from the interference pattern obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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