Device for internal coating of a container e.g. PET flasks performs plasma based chemical gas phase deposition of a reaction product

摘要

Device for internal coating of a container (1) by plasma based chemical gas phase deposition of a reaction product where the container has a neck region constricted to an opening (5) for production of a vacuum in the container. The device has a rod type gas lance (2) for introduction of process gas through opening (5) into the container and an element for excitation of the plasma. The lance has a main channel (3) of length l1 on its axis and a side channel of length l2.