ORGANOMETALLIC PRECURSOR COMPOUNDS

摘要

This invention relates to organometallic precursor compounds represented by the formula i-PrN=Ta(NR1R2)3 wherein R1 and R2 are the same or different and are alkyl having from 1 to 3 carbon atoms, provided that (i) when R1 is ethyl, then R2 is other than ethyl and (ii) when R2 is ethyl, then R1 is other than ethyl, and a method for producing a film, coating or powder from the organometallic precursor compounds.