SPATTERING TARGET AND METHOD OF MANUFACTURING THE SAME

摘要

A spattering target used when a thin-film is manufactured by spattering and a method of manufacturing the spattering target. The spattering target comprises backing plates and a bonding material layer for sticking them to each other. A spacer is not present in the bonding material layer, the thickness of the bonding material layer is within the range of 0.25 to 2 mm, and the sticking surface of the target and the sticking surfaces of the backing plates are substantially kept parallel with each other.