SHEET-LIKE OBJECT DRYING METHOD AND DEVICE, SHEET-LIKE OBJECT WASHING METHOD AND DEVICE, AND FOREIGN MATTER REMOVING METHOD AND DEVICE FOR SHEET-LIKE OBJECT

摘要

PROBLEM TO BE SOLVED: To provide a foreign matter removing method for a plurality of sheet-like objects capable of easily and efficiently removing foreign matters from the plurality of sheet-like objects. SOLUTION: In this foreign matter removing method for the sheet-like objects, the plurality of sheet-like objects are separated from each other by applying a gas to the plurality of sheet-like objects standing upright or inclined from a vertical direction at an angle not less than 0 degree and less than 90 degrees, and arranged in parallel with each other in a state of being kept into contact with each other, and the foreign matters are removed from the plurality of sheet-like objects by allowing the gas to pass through spaces among the plurality of sheet-like objects. COPYRIGHT: (C)2006,JPO&NCIPI