| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor which can protect a sensor chip from an acid or corrosive pressurized medium causing deterioration. SOLUTION: In the pressure sensor, a first protective member 41 composed of fluororubber is provided so as to cover the peripheral part of the sensor chip 21, in a state in which the sensing part of the sensor chip 21 is exposed, and a second protective member 42, composed of fluorin-based gel having elasticity lower than that of the first protective member 41 is provided so as to cover the first protective member 41 and the sensing part of the sensor chip 21. A third protective member 43, composed of a fluororesin having water repellence and corrosion resistance, is provided on the surface of the second protective member 42; and the second protective member 42 is set so as not to be exposed to the acid or corrosive pressurized medium, causing deterioration by the third protective member 43; and the pressurized medium is prevented from infiltrating the second protective member 42, by blocking the pressurized medium in the third protective member 43. COPYRIGHT: (C)2006,JPO&NCIPI
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