APPARATUS SURFACE ROUGHNESS MEASURING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To measure surface roughness of an apparatus accurately in a short time regardless of the installation position of the apparatus, such as in water or in the air. SOLUTION: This device is constituted so that a moving device 14 moves a measuring sensor 11 for receiving light from the apparatus surface 12 to a measuring position to thereby allow the measuring sensor 11 to scan along the apparatus surface 12. A distance measuring device 13 determines the distance between the measuring sensor 11 and the apparatus surface 12 based on a measuring signal from the measuring sensor 11 scanning by the moving device 14. An evaluation device 16 creates a shape image for showing the shape of the apparatus surface 12 based on scanning control information of the moving device 14 and the distance to the apparatus surface 12 determined by the distance measuring device 13, and measures the roughness of the apparatus surface based on the shape image. COPYRIGHT: (C)2006,JPO&NCIPI