| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a negative resist composition having a high resolution and capable of reducing LWR. <P>SOLUTION: In the negative resist composition containing an alkali-soluble resin (A), an acid generator (B) which generates an acid upon irradiation with a radiation and a crosslinking agent (C), a compound (D) represented by formula (1) is contained. In the formula (1), R' and R" each independently represents a 1-5C alkyl; and p is 2 or 3. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
