| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce dispersion of the heat value of coils per driving shaft, and to equalize the driving efficiency. <P>SOLUTION: This stage device is provided with a moving member that has a plurality of magnets; a stage fixed to the moving member; and a stator that is structured by stacking coils arranged, in such a way as to face the magnets at a prescribed intervals and in which the coils 1-3, 14 of each layer function as a plurality of driving shafts that drive the moving member in two-dimensional directions. By conducting a current to the coils, corresponding to each layer, a driving force to the moving stage is generated. In this stage device, the conductor area of a cross-section that makes the coil winding direction a normal is changed, according to the heat value of the coils corresponding to each layer. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
