| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrating table capable of uniformly applying ultrasonic vibration to a machined object. SOLUTION: The vibrating table is formed by fixing one or more vibrators 12 to the lower side surface of a hard table 11 for transmitting vibration applied to the lower side surface, as vibration preferentially vibrating along a thickness direction, to the upper side surface. The hard table 11 comprises, in binder resin 13, a plurality of high elasticity fibers 14a aligned in one direction along the surface of the hard table 11, and a plurality of high elasticity fibers 14b aligned in a direction intersecting the high elasticity fibers 14a, along the surface of the hard table 11. COPYRIGHT: (C)2006,JPO&NCIPI
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