发明名称 MOBILE POSITION CONTROL DEVICE AND STAGE DEVICE USING THIS CONTROL DEVICE
摘要 <p>A mobile position control device (60) comprising a coordinates conversion block (70), a translating direction control system (80) for feedback-controlling a Y1 linear motor (20A), a yawing direction control system (90) for feedback-controlling a Y2 linear motor (20B), and a thrust non-interfering block (100). Since estimated disturbance components are removed from a Y-direction translating thrust instruction value uy and a theta-direction thrust instruction value utheta respectively by a translating disturbance observer (82) and a rotating disturbance observer (92) even if a translating direction disturbance d1, and rotating direction disturbance d2 are input to the translating direction control system (80) and the yawing direction control system (90) respectively, linear motors (20A, 20B) can generate disturbance-unaffected drive forces F1, F2 respectively.</p>
申请公布号 WO2005111754(A1) 申请公布日期 2005.11.24
申请号 WO2005JP08367 申请日期 2005.05.06
申请人 SUMITOMO HEAVY INDUSTRIES, LTD.;SAKO, DAISUKE 发明人 SAKO, DAISUKE
分类号 B23Q1/58;G05B19/19;G05D3/00;H02P5/74;(IPC1-7):G05D3/00 主分类号 B23Q1/58
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