| 摘要 |
PROBLEM TO BE SOLVED: To improve the extraction accuracy of line defect and enhance the resistance to noise in a TFT array inspection device to precisely specify a cross line defect even in measured data with insufficient S/N. SOLUTION: The TFT array inspection device 1 for inspecting a TFT array based on two-dimensional measured data obtained by driving each pixel of a TFT substrate 2, comprises a data processing means 5 determining a defect point of line defect from the two-dimensional measured data of the TFT substrate 2. The data processing means 5 determines signal distribution profiles showing characteristics of x-directional and y-directional lines from the measured data of the lines, respectively, determines a y-directional position of defect point from the signal distribution profile showing the x-directional line characteristic, determines an x-directional position from the signal distribution profile showing the y-directional line characteristic, and determines the defect point of line defect from the x-directional position and the y-directional position. COPYRIGHT: (C)2006,JPO&NCIPI |
