| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal pulling method which makes it possible to obtain the specific resistance of a semiconductor crystal without cutting the semiconductor crystal to be shipped as product. SOLUTION: A sample single crystal 21 for measuring specific resistance is pulled by using a seed crystal 23, and a product single crystal 22 to be a product is pulled successively to the sample single crystal 21 by using a sample single crystal end part 21d formed at the lower end of the sample single crystal 21 as a seed crystal. COPYRIGHT: (C)2006,JPO&NCIPI
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