| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas detecting method for solving normal temperature operation impossible in a conventional catalyst type sensor and high sensitivity detection impossible in a light absorbing type sensor with good reliability. SOLUTION: A multilayered film formed of a first layer for adsorbing a specific gas and a second layer reduced in adsorption is utilized as a detection film, the detection film is put in the direction vertical to a light path and a change in stress occurring in the detection film by the adsorption of the gas is optically detected as coupling loss or the like. Alternatively, the stress occurring in the detection film by the adsorption of the gas is electrically detected by a piezoelectric element or a capacitor element. COPYRIGHT: (C)2006,JPO&NCIPI
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