发明名称 Replaceable anode liner for ion source
摘要 A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.
申请公布号 US2005258374(A1) 申请公布日期 2005.11.24
申请号 US20040849765 申请日期 2004.05.20
申请人 INFICON, INC. 发明人 ELLEFSON ROBERT E.;FREES LOUIS C.
分类号 H01J27/20;H01J49/10;H01J49/14;(IPC1-7):H01J49/14 主分类号 H01J27/20
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