发明名称 |
METHOD AND APPARATUS FOR APPLYING A SUBSTANCE TO A SUBSTRATE |
摘要 |
<p>A method for depositing a layer of an active substance on a substrate (2), wherein the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements, characterized in that the active substance is bound in a compound which is stable at room temperature, wherein the compound is incorporated in a wire (4), which wire forms a connection between two electrodes (5,6), wherein, for releasing the active substance, a current (7) is fed through the wire, so that it heats up to a temperature at which the compound decomposes and the active substance evaporates and then precipitates on the substrate. Further, an apparatus is described for carrying out the method.</p> |
申请公布号 |
WO2005111260(A1) |
申请公布日期 |
2005.11.24 |
申请号 |
WO2005NL00375 |
申请日期 |
2005.05.18 |
申请人 |
OTB GROUP B.V.;HOMPUS, MICHAEL, ADRIANUS, THEODORUS;SWINKELS, WILHELMUS, GODEFRIDUS, JOHANNES, PAULUS |
发明人 |
HOMPUS, MICHAEL, ADRIANUS, THEODORUS;SWINKELS, WILHELMUS, GODEFRIDUS, JOHANNES, PAULUS |
分类号 |
C23C14/26;H01L51/50;H01L51/56;(IPC1-7):C23C14/26 |
主分类号 |
C23C14/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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