METHOD FOR CLEANING A SURFACE OF A REMOTE PLASMA GENERATING TUBE AND METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING THE SAME,申请号KR20040036416-传众专利搜索

发明名称	METHOD FOR CLEANING A SURFACE OF A REMOTE PLASMA GENERATING TUBE AND METHOD AND APPARATUS FOR PROCESSING A SUBSTRATE USING THE SAME
摘要
申请公布号	KR20050111202(A)	申请公布日期	2005.11.24
申请号	KR20040036416	申请日期	2004.05.21
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	PARK, JAE YOUNG;LEE, SEUNG JIN;KIM, YOUNG MIN
分类号	H01L21/3065;B44C1/22;H01J37/32;H01J37/34;H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/304	主分类号	H01L21/3065
代理机构		代理人
主权项
地址