| 摘要 |
PROBLEM TO BE SOLVED: To achieve a reduction in the overall size and weight of a fluid regulator. SOLUTION: A main supply valve 41 and a main exhaust valve 42 are driven in correspondence with a change in pressure of regulating air supplied to an opening/closing drive part 43. The pressure of regulating air is controlled by a pilot valve part 39. The pilot valve part 39 comprises a pilot supply valve 2 disposed in a flow path of the air supplied to the opening/closing drive part 43, a pilot exhaust valve 3 disposed in a flow path of the air exhausted from the opening/closing drive part 43, and a control part 7 that controls the pilot supply valve 2 and the pilot exhaust valve 3. Microvalves manufactured by the MEMS technology are used for the pilot supply valve 2 and the pilot exhaust valve 3. COPYRIGHT: (C)2006,JPO&NCIPI
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