| 摘要 |
PROBLEM TO BE SOLVED: To set the temperature of a semiconductor device at a desired temperature with satisfactory responsivity in testing the semiconductor device. SOLUTION: This tester 100 controls the temperature of a device 120 under test in testing electrical characteristics of the device 120. The tester 100 comprises a power consumption measurement part 132 for measuring power consumption of the device 120 in testing the electrical characteristics, a surface temperature measurement element 106 for measuring surface temperature of the device 120, and a surface temperature controller 140 for controlling the temperature of the device 120 based on the surface temperature and the power consumption. COPYRIGHT: (C)2006,JPO&NCIPI
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