发明名称 |
Surface modification of a porous organic material through the use of a supercritical fluid |
摘要 |
An organic layer, such as a porous low-K dielectric in an IC, contains pores open at its surface. To close the pores, the organic layer is contacted by a supercritical fluid that is a solvent for the layer. After a small amount of the surface and the wall of the open pores is solvated, a phase transition of the solvated organic material is effected at the surface to cover it with a dense, smooth, non-porous film that seals the open pores.
|
申请公布号 |
US2005260402(A1) |
申请公布日期 |
2005.11.24 |
申请号 |
US20040852381 |
申请日期 |
2004.05.24 |
申请人 |
WANG CHING-YA;CHUANG PING;WU SUNNY;LIN YU-LIANG;TU HUNG-JUNG;ZHOU MEI-SHENG;LO HENRY |
发明人 |
WANG CHING-YA;CHUANG PING;WU SUNNY;LIN YU-LIANG;TU HUNG-JUNG;ZHOU MEI-SHENG;LO HENRY |
分类号 |
B05D3/04;B05D5/12;B32B3/26;C08K3/00;H01L21/3105;H01L21/312;H01L21/316;(IPC1-7):B05D5/12 |
主分类号 |
B05D3/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|