CLEANING METHOD FOR SEMICONDUCTOR DEVICE,申请号KR19980016991-传众专利搜索

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发明名称	CLEANING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100532380(B1)	申请公布日期	2005.11.24
申请号	KR19980016991	申请日期	1998.05.12
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, GWANG UK;JANG, GYU HWAN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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