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发明名称
A METHOD OF ILLUMINATING A PHOTOMASK USING CHEVRON ILLUMINATION
摘要
申请公布号
EP1315996(A4)
申请公布日期
2005.11.23
申请号
EP20010958877
申请日期
2001.07.06
申请人
ASM LITHOGRAPHY
发明人
SMITH, BRUCE, W.
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20;G03B27/72
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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