PAD FOR PROBE SESNSING, SUBSTRATE FORMED SEMICONDUCTOR DEVICE, METHOD FOR TEST OF SEMICONDUCTOR DEVICE AND TESTER OF SEMICONDUCTOR DEVICE

摘要

In an embodiment, a semiconductor device is tested using a probe pad that includes a probing region with which a probe needle makes contact, and a sensing region bordering an edge of the probing region. Electrical signals are applied, and measured results indicate the probe needle's location relative to a test position on the semiconductor device.