发明名称 Pressure sensor
摘要 A pressure gauge is arranged to function on the outside of a measuring element. The measuring element has a central cavity and is constituted by at least to parts, which are tightly joined for creation of the cavity. The measuring element has sensor organs for determining the mechanical state of stress of the measuring element during pressure influence. The two parts of the measuring element are manufactured with planar techniques, preferably by silicon or quarts with the cavity running in the longitudinal direction. The central cavity has a considerably greater height than width. The sensor organs have form of piezo-resistive elements arranged near an outer surface of the measuring element.
申请公布号 US6966229(B2) 申请公布日期 2005.11.22
申请号 US20040483398 申请日期 2004.01.12
申请人 PRESENS AS 发明人 SEEBERG BJOERN ERIK
分类号 G01L9/00;(IPC1-7):G01L9/00 主分类号 G01L9/00
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