发明名称 |
Apparatus of depositing thin film with high uniformity |
摘要 |
A deposition apparatus of depositing deposition material on a wafer in a vacuum chamber includes a deposition boat installed in the vacuum chamber to vaporize the deposition material, a wafer guide on which the wafer is loaded, the wafer guide having a rotational member rotating together with the wafer, a wafer-rotation device rotating the rotational member when the wafer guide approaches, and a wafer-transfer device reciprocating the wafer guide between an inlet of the vacuum chamber, the deposition boat and the wafer-rotation device.
|
申请公布号 |
US6966952(B2) |
申请公布日期 |
2005.11.22 |
申请号 |
US20040910417 |
申请日期 |
2004.08.04 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM YOUNG-EAL;CHOI SANG-JUN;MA DONG-JOON |
分类号 |
C23C14/24;C23C14/00;C23C14/50;C23C16/00;H01L21/68;H01L21/687;(IPC1-7):C23C14/00 |
主分类号 |
C23C14/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|