Resonator-type microelectronic pressure sensor that withstands high pressures

摘要

A microelectronic pressure sensor comprises a resonator ( 23 ) made on the basis of a crystalline material and secured to the inside of a package ( 24 ) made use of a cap ( 27 ) and a baseplate ( 26 ) for assembling one to the other. The cap ( 27 ) and the baseplate ( 26 ) are made completely or almost completely out of the same material as the resonator ( 23 ), and the pressure (Pe) to be detected is applied all around the package.