| 摘要 |
A method of manufacturing a nozzle assembly, the method comprising the steps of depositing a first dielectric layer 18 on a substrate 16 , depositing a first metal layer 102 at least partially on the first dielectric layer 18 , depositing a passivation layer 20 at least partially on the first dielectric layer 18 , depositing at least one sacrificial layer 108, 112 , depositing a second metal layer 116 , depositing a third metal layer 124 , depositing at least one further sacrificial layer 120, 128 , and a second dielectric layer 132 , and, depositing a third dielectric layer 138. |
