发明名称 |
Microelectromechanical floating element flow sensor |
摘要 |
An electromechanical floating element shear-stress sensor, which may also be referred to as a flow rate sensor, having one or more transduction mechanisms coupled to a support arm of a floating element wafer such that the transduction mechanisms are normal to the force applied to a top surface of the floating element. The transduction mechanisms may be generally attached to a side surface of one or more arms supporting the floating element and may be coupled together and to a processor using one or more contacts extending from the backside of the floating element sensor. Thus, the floating element shear-stress sensor may have an unobstructed surface past which a fluid may flow. The floating element may also include a temperature sensing system for accounting for affects of temperature on the floating element system.
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申请公布号 |
US6966231(B2) |
申请公布日期 |
2005.11.22 |
申请号 |
US20030701744 |
申请日期 |
2003.11.04 |
申请人 |
UNIVERSITY OF FLORIDA RESEARCH FOUNDATION, INC. |
发明人 |
SHEPLAK MARK;CATTAFESTA, III LOUIS N.;NISHIDA TOSHIKAZU |
分类号 |
G01F;G01F1/00;G01F1/20;G01F1/28;G01F15/02;G01L1/04;(IPC1-7):G01F1/00 |
主分类号 |
G01F |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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