| 摘要 |
FIELD: ceramics, chemistry. ^ SUBSTANCE: method for cleaning products made of BeO ceramics from carbon admixture includes bombing surface with positively charged ions of inert gas, at sparing modes: U = 0,5/2,0 kV, I = 5,0/40,0 mcA, tau = 10-20 min. After such treatment product is heated in 10-7-10-9 Pa vacuum up to temperature of 450-500°C, exposed during 15-20 min., and then surface is treated with high-frequency hydrogen plasma at following modes: plasma pressure no greater than 10-5 Pa, discharge current not exceeding I = 10,0 mcA, hydrogen atoms energy 5,0/10,0 eV. ^ EFFECT: higher reliability, higher durability, higher efficiency. ^ 1 dwg |
